it's complicated. afaik asml has agreements with the us govt, and cross licensing with american companies. also, asml only makes lithography tools, there's a LOT more to making semiconductors than just exposing patterns. and a few of the biggest vendors like kla and amat are american. kla in particular is essentially a monopoly in the metrology space.

It is a move to decouple from the USA for critical infrastructure. They don't want to be in a similar situation as Ukraine in any potential conflict. Where the USA just says we will no longer allow you to use our computer chips for war with Russia.